Modulkataloge

Apl. Prof. Uwe Zeitner

schriftliche Prüfung (100%)

Englisch

Keine

Wahlpflichtmodul M.Sc. Physik in der Vertiefung „Optik“

Wahlpflichtmodul M.Sc. Photonics

Vorlesung: 2 SWS

Übung: 1 SWS

• demands of micro- and nano-optics on fabrication technology
• basic optical effects of micro- and nano-structures and their description
• typical structure geometries in micro- and nano-optics
• coating technologies
• lithography (photo-, laser-, electron-beam) and its basic physical principles
• sputtering and dry etching
• special technologies (melting, reflow, …)
• applications and examples

In this course the student will learn about the fundamental fabrication technologies which are used in microoptics and nanooptics. This includes an overview of the physical principles of the different lithography techniques, thin film coating and etching technologies. After successful completion of the course the students should have a good overview and understanding of the common technologies used for the fabrication of optical micro- and nano-structures. They know their capabilities and limitations.